KLS Series Vacuum Linear Module | Used for Optical Coating

Core Perspective: The pursuit of "zero contamination" and "uniformity" in optical coating
Optical coatings, particularly laser mirrors and infrared antireflection layers, demand defect-free film structures. Any particle contamination can create "pinholes," drastically reducing the laser-induced damage threshold. Standard modules operating under high vacuum degree of 10^-7}Pa continuously outgas water vapor and hydrocarbons, which, when decomposed by plasma, deposit onto optics as absorptive contamination layers. The KLS Series Vacuum Linear Module fundamentally solves this problem. This vacuum linear module utilizes materials – from guideways and leadscrews to motor cables – that have undergone rigorous outgassing rate testing, with Total Mass Loss (TML) and Collected Volatile Condensable Materials (CVCM) meeting aerospace-grade requirements.
During ion-beam-assisted deposition (IBAD), this vacuum linear module must operate for extended periods at substrate heating temperatures reaching max +200°C. Its specially designed ferrofluidic feedthrough ensures no leakage at the motion feedthrough flange. When coating certain film stacks that require substrates to be cryogenically trapped at min -196°C, this vacuum linear module performs equally well without cold-induced jamming. For extreme ultraviolet (EUV) mirrors used in large-scale scientific facilities, the coating process is extremely vibration-sensitive. The KLS Series Vacuum Linear Module features a low-ripple drive algorithm that ensures the vibration amplitude generated during ±0.01mm repeatability motion remains below 50 nanometers.
Regarding specification selection, this vacuum linear module offers a heavy-duty version with a body width of 170mm. Its maximum load capacity of horizontal 150kg can support space-qualified primary mirrors exceeding one meter in diameter. Conversely, the miniature body width of 30mm vacuum linear module suits moving shutters or crystal monitor heads inside small experimental coaters. Notably, this vacuum linear module tolerates radiation intensity of 10^6Gy, qualifying it for post-coating treatment of radiation-resistant optical windows for nuclear facilities. In actual production, the KLS Series Vacuum Linear Module typically operates as a "planetary drive" for coating domes: it drives a planetary gear mechanism, moving optics in a programmed trajectory above evaporation sources, controlling film thickness non-uniformity to below 0.5%. The body width 40mm and 60mm versions are most popular due to their low installation profile and ease of integration. Furthermore, this vacuum linear module offers remote fault diagnosis. If abnormal resistance is detected within the 10^-7Pa vacuum chamber, it issues early warnings, preventing costly chamber venting and production losses. Simply put, without a clean, reliable vacuum linear module like the KLS Series, high-end optical coating cannot transcend from "acceptable" to "exceptional."