KSSM Series Vacuum Servo Motor | Applied in Vacuum Optical Sputtering

● Safe brake

● 48/110VDC winding voltage

● Custom cable lengths

Vacuum optical sputtering is a key process for manufacturing high-quality optical thin films (such as anti-reflection coatings, high-reflection coatings, and optical filters), requiring the coating chamber to be maintained at an ultra-high vacuum of 10⁻⁷ Pa to prevent residual gas molecules from affecting film purity and interface quality. In this process, the workpiece holder needs to rotate continuously, tilt, or move in complex trajectories to achieve uniform film thickness distribution and excellent optical performance. The KSSM series vacuum servo motor is an ideal choice for driving such motions. As a professional vacuum servo motor, the KSSM series operates reliably for extended periods under 10⁻⁷ Pa ultra-high vacuum, with its stainless steel housing and special sealing design ensuring extremely low material outgassing rates, preventing vacuum degradation or optical film contamination from outgassing. Unlike conventional motors, this vacuum servo motor features high-temperature-resistant windings and low-volatility lubrication systems specifically designed for vacuum environments, remaining stable and reliable even during baking degassing processes at operating temperatures as high as 260℃. During actual coating processes, the KSSM series vacuum servo motor is installed directly inside the vacuum chamber, driving optical coating domes or planar target substrate stages, achieving "in-chamber direct drive" and eliminating complex dynamic seals and additional torque losses associated with traditional feedthrough mechanisms. This vacuum servo motor is equipped with a resolver as a feedback element, offering strong electromagnetic interference immunity and providing accurate speed and position signals even in strong electromagnetic noise environments generated by plasma glow discharges or ion source bombardment. For optical coating processes requiring deep cryogenic cooling, the KSSM series vacuum servo motor adapts to extreme low temperatures of -196℃, ensuring that lubrication does not solidify and output power does not derate inside liquid nitrogen-cooled chambers. Multiple vacuum servo motors can work cooperatively to achieve multi-axis synchronous control, enabling complex trajectory scanning coating of optical elements. After adopting the KSSM series vacuum servo motor, optical coating equipment can eliminate external motors and magnetic fluid seals, significantly reducing system complexity and leakage risks. From deep ultraviolet to far infrared, from consumer-grade lenses to aerospace-grade optical payloads, the application of vacuum servo motors has made high-volume production of high-quality optical thin films possible. The KSSM series vacuum servo motor, with its dual advantages of ultra-high vacuum compatibility and ultra-wide temperature range adaptability, has become a core motion component in vacuum optical sputtering equipment, fully demonstrating the critical value of vacuum servo motors in modern optical manufacturing technology.