VB Series Vacuum Electric Cylinder | Applied for Optical Thin Film Coating Equipment

High-end precision manufacturing processes including high-end optical thin film coating, infrared optical element evaporation, semiconductor functional thin film deposition and precision optoelectronic device coating impose extremely strict requirements on cavity cleanliness, vacuum stability and transmission purity. When operating in a closed vacuum cavity, ordinary electric cylinders continuously release organic gas, shed tiny dust particles and volatilize grease impurities, easily causing quality defects such as pinholes, scratches, uneven thickness and reduced light transmittance on coated films, resulting in large-scale product scrapping and failing to meet the precision production standards of high-end optoelectronic manufacturing. Specially developed for ultra-high vacuum clean processes, the VB series vacuum electric cylinder adopts an ultra-low outgassing dense material and fully sealed integrated welding structure. It can operate stably for a long time under an ultra-high vacuum degree of 10⁻⁷Pa, with no gas release, volatilization or particle shedding during operation, causing no pollution to the vacuum cavity and fully meeting the ultra-clean and high-precision process requirements of optical coating. Adaptable to the full-process temperature control working conditions of coating equipment, the VB series vacuum electric cylinder works stably in a wide-temperature vacuum environment ranging from -80℃ to +200℃. It adapts to full-process temperature switching including low-temperature pre-cooling, high-temperature baking degassing, constant-temperature thin film deposition and cooling shaping, with vacuum seals free of deformation, air leakage and loosening caused by temperature changes, ensuring constant cavity vacuum all the time. To meet the multi-station and multi-stroke production demands of optical coating equipment, the VB series vacuum electric cylinder is equipped with an ultra-wide stroke range of 30～1500mm, flexibly adapting to short-distance fine adjustment of small laboratory coating equipment and long-distance substrate translation, target feeding and baffle precise switching of large-scale industrial mass production coating lines. Featuring smooth and linear transmission without jitter or impact, it effectively guarantees the uniformity and consistency of thin film deposition, greatly improves the yield and precision of optical products, and acts as an indispensable core vacuum transmission supporting device in the fields of high-end optical coating, semiconductor thin film preparation and precision optoelectronic manufacturing.