KRS Series Vacuum Rotary Platform | Applied in Ion Beam Sputtering Substrate Rotation Systems

Ion beam sputtering (IBS) coating processes impose stringent requirements on both vacuum environment and substrate motion precision. During film deposition, the angular relationship between the substrate surface normal and the incident ion beam direction directly affects the film's microstructure and optical constants. The KRS Series Vacuum Rotary Platform is installed inside the coating vacuum chamber as the substrate holding and rotation mechanism, achieving an ultimate vacuum level of 10⁻⁷ Pa that meets the baseline vacuum requirements for IBS processes. The main structure of this vacuum rotary platform is fabricated from stainless steel, with metal seals and low-vapor-pressure lubricants that do not introduce additional hydrocarbon contaminants during pump-down, thereby preserving the purity of deposited films. In terms of mechanical design, this vacuum rotary platform places the drive motor on the atmospheric side, transmitting torque through a magnetic fluid feedthrough seal, which ensures vacuum integrity while minimizing thermal radiation from the motor into the chamber. During coating operations, this vacuum rotary platform can perform continuous uniform rotation or stepwise indexing rotation, with a repeatable accuracy of ±0.005° (±0.3′). To accommodate different coating material process windows, this vacuum rotary platform operates normally across an ambient temperature range of -80°C to +200°C, adapting to both the temperature rise from ion bombardment on substrates and the radiative cooling from cryogenic pump cold panels. This vacuum rotary platform is available in multiple sizes including KRS160 and KRS400, with the KRS400 model supporting a central load capacity of up to 150 kg, suitable for large-diameter wafers or large-aperture optical substrates. In film uniformity tests, narrow-band filters deposited using this vacuum rotary platform exhibited peak wavelength deviations within ±0.2% of the design target, confirming the platform's effectiveness in improving film thickness uniformity.