Vacuum Environment Solutions

Superior Environmental Resistance: Designed to withstand challenging conditions, this stepper motor offers high durability against 95% humidity, low air pressure, and salt spray corrosion.

Customizable Configurations: This stepper motor supports flexible integration through optional add-ons such as holding brakes, position feedback sensors (encoders), and non-standard shafts.

High-Temperature Performance: Engineered for reliability in demanding thermal environments, this stepper motor functions flawlessly at ambient temperatures up to +85°C while also capable of extreme lows down to -60°C.

Versatile Application Scope: Leveraging its robust design, this stepper motor is widely deployed in fields such as biomedicine, automotive parts testing, military/aerospace, outdoor surveillance, and general automation.

Robust Mechanical Stability: Featuring a rugged construction, this stepper motor provides strong resistance to shock and vibration, ensuring consistent performance in high-motion or mobile applications.

Wide Torque Range: With a holding torque span of 0.1 to 7.5 Nm, this stepper motor is available in various frame sizes (NEMA 11 to 43) to meet diverse power requirements.

Robust Environmental Tolerance: Designed to withstand harsh conditions, this stepper motor offers high durability against 95% humidity, low air pressure, salt spray, vibration, and shock.

Versatile Application Scope: Built for demanding environments, this stepper motor is widely used in industrial automation, testing equipment, and systems requiring consistent performance under extreme conditions.

Wide-Temperature Operation: This stepper motor is engineered for challenging thermal environments, delivering reliable performance across a broad range from -45°C to +100°C.

Extended Torque Range: With holding torque spanning 0.12 to 21 N·m, this stepper motor is available in multiple frame sizes (NEMA 11, 17, 22, 34, 43) to suit diverse power requirements.

Flexible Configuration Options: This stepper motor supports integration with optional features such as a safety brake, position feedback, and non-standard shaft designs for application-specific needs.

Wide Power & Torque Range: Available with rated power from 400W to 3.8kW and holding torque from 1.27 to 15 N.m, this servo motor provides flexible options to meet diverse application requirements.

High-Speed Operation: With a rated speed of 3000 rpm, this servo motor ensures precise and efficient motion control for high‑throughput semiconductor equipment.

Robust Construction: Featuring a stainless steel housing and a specially designed resolver for position feedback, this servo motor delivers reliable performance under harsh conditions where standard motors fail.

Multiple Voltage Options: This servo motor supports winding voltages of 48 VDC, 220 VAC, or 380 VAC, allowing seamless integration into various system architectures.

Extreme-Environment Compatibility: This servo motor is engineered for ultra-high vacuum (10⁻⁸ Pa), cryogenic temperatures down to -196°C, high temperatures up to +260°C, and radiation exposure up to 10⁶ Gy, making it ideal for semiconductor manufacturing and other demanding applications.

Robust Environmental Tolerance: Built to withstand harsh conditions, this servo motor offers high durability against vibration, shock, and high humidity, ensuring consistent operation in challenging settings.

Precision Feedback Options: Featuring either a resolver or a geared multi-turn absolute encoder, this servo motor delivers unparalleled accuracy and reliable position feedback for mission-critical applications.

Extreme-Temperature Operation: This servo motor is engineered for reliable performance across a wide thermal range from -60°C to +120°C, making it suitable for both cryogenic and high-heat environments.

Flexible Power Range: With rated power spanning 0.1 kW to 3.8 kW, this servo motor provides versatile options to meet the demands of various extreme-environment applications.

Vacuum Compatibility: Designed for demanding applications, this servo motor operates reliably in vacuum conditions down to 10⁻³ Pa without compromising function or longevity.

Multiple Control Interfaces: Featuring pulse/direction, RS485 (Modbus RTU), EtherCAT, and CANopen, this servo drive enables seamless communication and precise command delivery to connected servo motors.

Wide Environmental Adaptability: Engineered for reliability across different settings, this servo drive operates in standard environments (0–40°C) as well as extreme conditions (-40 to +70°C, 95% humidity, vibration, and shock), ensuring consistent performance when paired with compatible servo motors.

Versatile Power Options: This servo drive supports DC24/48V and AC220/380V inputs, providing flexible power solutions for a wide range of servo motors across different system architectures.

Diverse Command Modes: In addition to digital communication, this servo drive supports analog voltage control for speed or torque, offering versatile operation modes to suit various servo motor applications.

Flexible Feedback Compatibility: Designed to work with both resolver and multi-turn absolute encoder feedback, this servo drive ensures accurate position, speed, and torque control for KECM and KSSM series servo motors.CANopen

High Load Capacity: Despite its compact size, this linear motion stage offers high load capacity, providing stable and accurate motion even under significant payloads.

Versatile Applications: Widely used in biomedical research, semiconductor manufacturing, environmental simulation testing, in-vacuum processing equipment, and general automation, this linear motion stage meets the rigorous demands of advanced industrial and scientific environments.

Extreme-Environment Compatibility: This linear motion stage is engineered for ultra-high vacuum (10⁻⁸ Pa), cryogenic temperatures down to -196°C, high temperatures up to +260°C, and radiation exposure up to 10⁶ Gy, ensuring reliable operation in the most demanding conditions.

Compact & Rigid Design: Featuring an integrated structure and compact footprint, this linear motion stage delivers high rigidity, exceptional repeatability, and fast speed, making it ideal for precision-critical applications.

High Load Capacity: With a load capacity of up to 60 kg, this rotation stage delivers stable and precise rotary motion even under substantial payloads.

Versatile Applications: Widely used across biomedical research, semiconductor manufacturing, 3C electronics production, automotive testing, in-vacuum processing, military and aerospace, nuclear energy, scientific instrumentation, and general automation, this rotation stage is built to excel in the most demanding sectors.

Multiple Diameter Options: Available in diameters of 60mm, 100mm, and 160mm, this rotation stage offers flexible sizing to accommodate diverse application requirements.

Extreme-Environment Compatibility: This rotation stage is engineered for demanding conditions, including vacuum, cryogenic temperatures, high heat, and radiation, ensuring reliable performance in harsh industrial and scientific environments.

Precision & Durability: Featuring a compact structure and high accuracy, this rotation stage provides exceptional repeatability and a long service life, making it ideal for mission-critical operations.

Torque Multiplication: By effectively increasing motor torque, this planetary gearbox optimizes mechanical transmission systems and enables handling of high-load applications with ease.

Versatile Application Scope: Widely used in semiconductor manufacturing, biomedical equipment, aerospace, nuclear facilities, and general automation, this planetary gearbox is the ideal choice for extreme-environment motion control systems.

Advanced Design & Materials: Utilizing high-quality materials, advanced structural designs, and cutting-edge lubrication technologies, this planetary gearbox delivers reliable performance in the most demanding conditions.

High Rigidity & Durability: Engineered for exceptional rigidity and stability, this planetary gearbox maintains accuracy under heavy loads and harsh operating environments.

Enhanced Precision & Control: This planetary gearbox provides superior step resolution and optimal inertia ratios, ensuring precise movements and improved system efficiency.

Extreme-Environment Compatibility: This planetary gearbox is engineered to withstand cryogenic temperatures down to -196°C, high temperatures up to +200°C, vacuum levels as low as 10⁻⁷ Pa, and radiation exposure up to 10⁶ Gy.