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KLS Series Vacuum High-Low Temperature Linear Module - China Suppliers & Factory for Semiconductor Testing
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KLS Series Vacuum High-Low Temperature Linear Module - China Suppliers & Factory for Semiconductor Testing

Introducing our high-performance stepper motors, specifically designed for demanding applications in vacuum, cryogenic environments, high temperatures, and radiation exposure. Perfectly suited for industries that require precision and reliability, our stepper motors are ideal for those sourcing from China, Key Features:, - **Vacuum Capability:** Operates efficiently in environments as low as 10-7Pa, - **Temperature Range:** Handles extreme temperatures from -196°C to 200°C, ensuring versatility across various applications, - **Radiation Resistance:** Built to withstand radiation levels up to 106Gy, making them suitable for specialized environments, - **Base Width Options:** Available in base widths of 30mm, 40mm, 60mm, 80mm, 135mm, and 170mm to meet your specific requirements, - **Load Capacity:** Supports a maximum horizontal load of 150Kg and a vertical load of 100Kg, providing strong performance in various setups, - **Precision Engineering:** Achieves exceptional repeatability of ±0.01mm, ensuring accuracy in every operation, As a trusted supplier and factory in China, we are committed to delivering stepper motors that exceed industry standards, making them the ideal choice for advanced applications

    Ordering Information
    KLS
    ① Product series

    KLS series linear motion stage

    ② Base width(mm)

    30 = 30mm

    40 = 40mm

    60 = 60mm

    80 = 80mm

    140 = 135mm

    170 = 170mm

    ③ Stroke length(mm)

    50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, 650, 700, 750, 800, 850, 900, 950, 1000, 1050, 1100, 1150, 1200, 1250, 1300, 1350, 1400, 1450, 1500

    Please refer to the specification tables for the available stroke length.

    ④ Screw lead(mm)

    2, 4, 5, 10, 16, 20mm

    Please refer to the specification tables for the available screw lead.

    ⑤ Motor mounting

    ISC: in-line (with coupling)

    PR: parallel on right side (with high precision gear, ratio 1:1)

    PL: parallel on left side (with high precision gear, ratio 1:1)

    PB: parallel below the linear motion stage (with high precision gear, ratio 1:1)

    Motor Mounting Options
    ⑥ Environmental temperature ratings
    Environmental temperature rating code Temperature range (℃) Vacuum class (Pa, optional) Radiation resistance (Gy, optional)
    RHT -20~+200 10-3 106
    SHT -20~+200 10-3/10-5/10-7 -
    HT -20~+150 10-3/10-5/10-7 -
    NTL1 -40~+85 10-3/10-5 -
    NTL2 -40~+100 - -
    NTL3 -65~+125 10-3 -
    NTL4 -80~+40 10-3 -
    NTL5 -55~+150 - -
    ⑦ Vacuum class

    Blank: Non-vacuum

    V3: Low pressure or vacuum to 10-3Pa

    V5: Vacuum to 10-5Pa

    V7: Vacuum to 10-7Pa

    ⑧ Radiation resistance

    Blank: No radiation resistance

    RH: Radiation resistance (total dose 106Gy)

    ⑨ Designator of mounted motor

    e.g.

    KH42: KH series 42mm stepper motor

    KVM57: KVM series 57mm stepper motor

    KECM400: KECM series 400W servo motor

    KSSM750: KSSM series 750W servo motor

    PB60L2: PB60 2-stage reducer (please specify the reducer stage, e.g. L1 or L2)

    Description

    Core Perspective: Solving "thermal shock-induced jamming and precision drift" in three-temperature testing

    In semiconductor three-temperature testing, chips are often rapidly transferred from a liquid nitrogen environment at -196°C to a high-temperature test zone at +200°C – a temperature swing of nearly 400°C. Standard linear modules frequently suffer from material mismatch under such drastic thermal shock, leading to "jamming" or "stick-slip" behavior that interrupts testing or damages expensive probe cards. The KLS Series Vacuum High-Low Temperature Radiation-Resistant Linear Module is specifically engineered to overcome this challenge. This vacuum high-low temperature radiation-resistant linear module utilizes specialized anti-galling materials for its leadscrews and guideways, ensuring no brittle fracture at min -196°C while maintaining adequate hardness and stiffness at max +200°C. When the test chamber is evacuated to a high vacuum degree of 10^-7Pa, conventional greases would rapidly outgas and disappear. To counter this, this vacuum high-low temperature radiation-resistant linear module employs ceramic-based dry film lubrication, completely eliminating lubrication failure caused by alternating high and low temperatures.

    More critically, the radiation aging test within three-temperature testing requires the module to withstand radiation intensity of 10^6Gy without becoming brittle. Therefore, the KLS Series Vacuum High-Low Temperature Radiation-Resistant Linear Module features radiation-hardened cable jackets and encoder code discs. In terms of mechanical specifications, this vacuum high-low temperature radiation-resistant linear module is offered in body widths of 30/40/60/80/135/170 mm, with the 60mm and 80mm widths being the most common configurations for probe stations. Its maximum load capacity of horizontal 150kg and vertical 100kg is sufficient to support ceramic heating chucks loaded with multiple wafers. The repeatability of ±0.01mm ensures precise alignment between probe tips and bond pads.

    In a typical burn-in test system, the vacuum high-low temperature radiation-resistant linear module undergoes dozens of cycles from low to high temperature daily, each accompanied by drastic vacuum fluctuations. The bellows seal structure of this vacuum high-low temperature radiation-resistant linear module effectively balances internal and external pressure differentials. Moreover, the compact body width of 30mm allows dense packing within multi-site parallel test handlers. Additionally, this vacuum high-low temperature radiation-resistant linear module features a nitrogen purge port to prevent condensation on chamber walls at low temperatures, which could otherwise impair optical alignment. For automotive-grade chip three-temperature testing, every sample requires full traceability. The KLS Series Vacuum High-Low Temperature Radiation-Resistant Linear Module integrates position feedback that uploads displacement data at each temperature setpoint to the MES system. In conclusion, whether facing the cryogenic shock of -196°C, prolonged baking at +200°C, or high-energy particle bombardment at 10^6Gy, this vacuum high-low temperature radiation-resistant linear module consistently delivers stable output with ±0.01mm precision, thoroughly resolving the industry's long-standing pain point of temperature-induced motion failure.

    Thermal Shock Blockage and Three-Temperature Test Accuracy Drift Scenario Diagram
    Frequently Asked Questions (FAQ)
    Q: How does the KLS Series linear module prevent jamming during rapid extreme temperature transitions?

    The KLS Series utilizes specialized anti-galling materials for its leadscrews and guideways. This design prevents brittle fracture at cryogenic temperatures as low as -196°C while maintaining necessary structural hardness and stiffness at high temperatures up to +200°C, resolving material mismatch issues.

    Q: What lubrication technology is used for high vacuum environments?

    In high vacuum levels up to 10-7Pa where standard greases outgas and fail, the KLS linear motion stages utilize ceramic-based dry film lubrication. This ensures consistent operation and eliminates lubrication breakdown caused by alternating high and low temperatures.

    Q: Can the KLS Series withstand radiation environments during semiconductor testing?

    Yes, the module is designed for radiation aging tests. With the optional radiation resistance (RH) configuration, it features radiation-hardened cable jackets and encoder code discs capable of withstanding radiation intensities up to 106Gy without becoming brittle.

    Q: What are the positioning precision and load capacities of these linear stages?

    The KLS Series offers a repeatability of ±0.01mm, ensuring precise alignment. It supports a maximum horizontal load capacity of 150kg and a vertical load capacity of 100kg, which is ideal for heavy ceramic heating chucks and wafer test setups.

    Q: How does the system prevent condensation at low temperatures?

    The module features an integrated nitrogen purge port. Purging with nitrogen prevents condensation on chamber walls and optical components during low-temperature cycles, ensuring clear optical alignment and safety.

    Q: Is position feedback supported for production tracking and MES integration?

    Yes, the KLS Series integrates position feedback sensors that upload real-time displacement data at each temperature setpoint directly to the MES (Manufacturing Execution System), providing full traceability for automotive-grade chip testing.

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