China Suppliers Factory KSSM Series Vacuum Radiation-Resistant Servo Motor for Wafer Transport Robots
| Environmental temperature rating code | Temperature range (℃) | Vacuum class (Pa, optional) |
Radiation resistance (Gy, optional) |
|---|---|---|---|
| RHT | -20～+200 | 10-3 | 106 |
| SHT | -20～+200 | 10-3/10-5/10-7 | - |
| HT | -20～+150 | 10-3/10-5/10-7 | - |
| NTL1 | -40～+85 | 10-3/10-5 | - |
| NTL2 | -60～+120 | 10-3/10-5 | - |
| NTL3 | -65～+125 | 10-3 | - |
| NTL4 | -60～+150 | - | - |
| NTL5 | -80～+40 | 10-3 | - |
| SLT* | -196～+40 | 10-3/10-3/10-3 | - |
| L*H* | customized | customized | customized |
Within advanced semiconductor fabs, wafer handling robots must execute precise pick-and-place sequences inside process chambers maintained at 10⁻⁷ Pa. The KSSM series vacuum high and low temperature radiation-resistant servo motor is engineered to meet these extreme demands. This vacuum high and low temperature radiation-resistant servo motor employs a stainless steel envelope and proprietary sealing techniques, yielding outgassing rates so low that ultra-high vacuum integrity remains uncompromised. Across a temperature spectrum from -196℃ up to +260℃, the vacuum high and low temperature radiation-resistant servo motor delivers consistent torque — whether submerged in liquid nitrogen or exposed to post-process baking. For environments where scattered X-rays or electron beams are present, the unit withstands accumulated doses of 1×10⁶ Gy, thanks to radiation-hardened insulation, lubricants, and feedback components. A resolver-based feedback system provides absolute position data while rejecting electromagnetic interference from nearby plasma sources. Mounted directly at robotic arm articulations, the KSSM series vacuum high and low temperature radiation-resistant servo motor eliminates the need for magnetic fluid feedthroughs, reducing mechanical complexity and improving dynamic response. Every vacuum high and low temperature radiation-resistant servo motor is subjected to vacuum bake-out and radiation aging protocols prior to shipment, ensuring trouble-free operation in high-volume manufacturing environments. Adoption of this vacuum high and low temperature radiation-resistant servo motor has led to measurable improvements in wafer transport reliability and reductions in breakage incidents. Whether configured for 200 mm or 300 mm platforms, the KSSM series vacuum high and low temperature radiation-resistant servo motor provides a dependable motion solution. Consequently, the vacuum high and low temperature radiation-resistant servo motor has become a cornerstone of modern wafer handling, affirming its essential role in semiconductor front-end processing.
