KLS Series Vacuum High-Low Temperature Radiation-Resistant Linear Module from China Suppliers and Factory for Semiconductor Testing
Ordering Information
KLS series linear motion stage
30 = 30mm
40 = 40mm
60 = 60mm
80 = 80mm
140 = 135mm
170 = 170mm
50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, 650, 700, 750, 800, 850, 900, 950, 1000, 1050, 1100, 1150, 1200, 1250, 1300, 1350, 1400, 1450, 1500
* Please refer to the specification tables for the available stroke length.
2, 4, 5, 10, 16, 20mm
* Please refer to the specification tables for the available screw lead.
ISC: in-line (with coupling)
PR: parallel on right side (with high precision gear, ratio 1:1)
PL: parallel on left side (with high precision gear, ratio 1:1)
PB: parallel below the linear motion stage (with high precision gear, ratio 1:1)
| Environmental temperature rating code | Temperature range (℃) | Vacuum class (Pa, optional) | Radiation resistance (Gy, optional) |
|---|---|---|---|
| RHT | -20~+200 | 10-3 | 106 |
| SHT | -20~+200 | 10-3/10-5/10-7 | - |
| HT | -20~+150 | 10-3/10-5/10-7 | - |
| NTL1 | -40~+85 | 10-3/10-5 | - |
| NTL2 | -40~+100 | - | - |
| NTL3 | -65~+125 | 10-3 | - |
| NTL4 | -80~+40 | 10-3 | - |
| NTL5 | -55~+150 | - | - |
Blank = Non-vacuum
V3 = Low pressure or vacuum to 10-3Pa
V5 = Vacuum to 10-5Pa
V7 = Vacuum to 10-7Pa
Blank = No radiation resistance
RH = Radiation resistance (total dose 106Gy)
e.g.
KH42 = KH series 42mm stepper motor
KVM57 = KVM series 57mm stepper motor
KECM400 = KECM series 400W servo motor
KSSM750 = KSSM series 750W servo motor
PB60L2 = PB60 2-stage reducer (please specify the reducer stage, e.g. L1 or L2)
Description
Core Perspective: Solving "thermal shock-induced jamming and precision drift" in three-temperature testing
In semiconductor three-temperature testing, chips are often rapidly transferred from a liquid nitrogen environment at -196°C to a high-temperature test zone at +200°C – a temperature swing of nearly 400°C. Standard linear modules frequently suffer from material mismatch under such drastic thermal shock, leading to "jamming" or "stick-slip" behavior that interrupts testing or damages expensive probe cards. The KLS Series Vacuum High-Low Temperature Radiation-Resistant Linear Module is specifically engineered to overcome this challenge. This vacuum high-low temperature radiation-resistant linear module utilizes specialized anti-galling materials for its leadscrews and guideways, ensuring no brittle fracture at min -196°C while maintaining adequate hardness and stiffness at max +200°C. When the test chamber is evacuated to a high vacuum degree of 10^-7Pa, conventional greases would rapidly outgas and disappear. To counter this, this vacuum high-low temperature radiation-resistant linear module employs ceramic-based dry film lubrication, completely eliminating lubrication failure caused by alternating high and low temperatures.
More critically, the radiation aging test within three-temperature testing requires the module to withstand radiation intensity of 10^6Gy without becoming brittle. Therefore, the KLS Series Vacuum High-Low Temperature Radiation-Resistant Linear Module features radiation-hardened cable jackets and encoder code discs. In terms of mechanical specifications, this vacuum high-low temperature radiation-resistant linear module is offered in body widths of 30/40/60/80/135/170 mm, with the 60mm and 80mm widths being the most common configurations for probe stations. Its maximum load capacity of horizontal 150kg and vertical 100kg is sufficient to support ceramic heating chucks loaded with multiple wafers. The repeatability of ±0.01mm ensures precise alignment between probe tips and bond pads.
In a typical burn-in test system, the vacuum high-low temperature radiation-resistant linear module undergoes dozens of cycles from low to high temperature daily, each accompanied by drastic vacuum fluctuations. The bellows seal structure of this vacuum high-low temperature radiation-resistant linear module effectively balances internal and external pressure differentials. Moreover, the compact body width of 30mm allows dense packing within multi-site parallel test handlers. Additionally, this vacuum high-low temperature radiation-resistant linear module features a nitrogen purge port to prevent condensation on chamber walls at low temperatures, which could otherwise impair optical alignment. For automotive-grade chip three-temperature testing, every sample requires full traceability. The KLS Series Vacuum High-Low Temperature Radiation-Resistant Linear Module integrates position feedback that uploads displacement data at each temperature setpoint to the MES system. In conclusion, whether facing the cryogenic shock of -196°C, prolonged baking at +200°C, or high-energy particle bombardment at 10^6Gy, this vacuum high-low temperature radiation-resistant linear module consistently delivers stable output with ±0.01mm precision, thoroughly resolving the industry's long-standing pain point of temperature-induced motion failure.
Frequently Asked Questions
Q1: How does the KLS linear module prevent jamming during extreme temperature swings?
A1: The KLS Series uses specialized anti-galling materials for its leadscrews and guideways. This prevents brittle fractures at temperatures down to -196°C while maintaining necessary hardness and stiffness at temperatures up to +200°C, avoiding material mismatch and jamming during thermal shock.
Q2: What type of lubrication is used in high-vacuum environments?
A2: The module employs a ceramic-based dry film lubrication. Standard greases outgas and fail in high vacuum conditions (up to 10-7Pa), but this dry film lubrication ensures stable operation under alternating high and low temperatures.
Q3: Can the KLS module withstand radiation environments?
A3: Yes, the module is designed with radiation-hardened components, including cable jackets and encoder code discs, allowing it to withstand radiation intensities of up to 106Gy without becoming brittle.
Q4: What are the load capacity and positioning repeatability of the module?
A4: The KLS Series supports a maximum horizontal load capacity of 150kg and a vertical load capacity of 100kg, with a high positioning repeatability of ±0.01mm to ensure precise alignment.
Q5: What base widths and motor mounting options are available?
A5: It is available in body widths of 30mm, 40mm, 60mm, 80mm, 135mm (140), and 170mm. Motor mounting options include in-line (ISC) and parallel configurations on the right (PR), left (PL), or below (PB) utilizing a 1:1 gear ratio.







