The KSSM series servo motor is a special servo motor designed for application environments such as ultra-high vacuum ultra-high tem- perature, deep low temperature, and irradiation. The shell is made of stain- less steel material and uses a rotary transformer as the motor position feedback component. Rated power of 400W, 750W.1800W, 3800W, volt- age level of 48VDC/220V AC/380VAC.
KVM Series Low-Temperature Stepper Motors: China Suppliers and Factory for Semiconductor Manufacturing Applications
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Discover high-performance stepper motors designed for demanding applications in vacuum, cryogenic, high temperature, and radiation environments. These motors are ideal for precision tasks in various settings.
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Vacuum Capability: operational up to 10-7Pa, ensuring reliability in ultra-high vacuum applications.
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Wide Operating Temperature: functional in extreme conditions ranging from -196℃ to 200℃.
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Radiation Resistance: capable of withstanding radiation levels up to 106Gy, making it suitable for nuclear and space applications.
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Motor Flange Sizes: available in a variety of sizes: 28/42/57/86mm, compatible with Nema 11/17/23/34 standards.
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Holding Torque: ranges from 0.04 to 4.4Nm, providing flexibility for various applications.
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Basic Step Angle: features a precision angle of 1.8° with an accuracy of 5%, ensuring precise movements.
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Lubrication Options: choose between grease or dry lubrication to meet specific operational needs.
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Optional Features: enhance functionality with resolver feedback, safe brake, double shaft, or modified shaft configurations.
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As a trusted China stepper motor supplier and factory, we prioritize quality and performance to meet the needs of our customers. Our innovative designs ensure that each motor can withstand the rigors of specialized applications while delivering exceptional precision. Contact us today for more information on how our stepper motors can benefit your projects.
* It is not possible to install both brake and position feedback devices on one single motor.
** Kingsni can provide signal converter to convert resolver signals to RS485 output or A/B incremental pulse output.
Description
Semiconductor manufacturing involves multiple core processes, including etching, ion implantation, wafer inspection, and low-temperature annealing. The production environment is characterized by ultra-high vacuum, low-temperature operations, and minimal radiation, placing extremely high demands on the low-temperature performance, positioning accuracy, and reliability of drive components. The KVM Series Low-Temperature Stepper Motors are deeply rooted in the semiconductor industry and specifically engineered for harsh low-temperature processes. These motors seamlessly integrate into the entire semiconductor production workflow, making them the preferred core drive solution for wafer processing equipment. These low-temperature stepper motors can achieve an ultra-high vacuum level of 10⁻⁷ Pa. Utilizing solid lubrication technology, they emit no gases, thereby maintaining the ultra-high cleanliness standards of semiconductor chambers, preventing impurity contamination of wafers, and ensuring process stability. The low-temperature performance of these motors has been specially optimized to maintain stable operation in extreme cold environments, and their clean design fully meets the requirements of semiconductor cleanroom production.
Semiconductor cryogenic processes demand extremely strict temperature control. With exceptional low-temperature performance, these motors operate stably at extreme temperatures as low as -196°C while also withstanding high-temperature conditions up to +200°C, making them suitable for various process requirements such as cryogenic etching and high-temperature annealing. These low-temperature stepper motors maintain stable torque within the range of 0.04–6 Nm, meeting the drive requirements for both light and heavy loads. With flange sizes available in 28, 42, 57, and 86 mm, they can be integrated with various models of precision semiconductor equipment. To withstand high-energy radiation in processes such as ion implantation, the cryogenic stepper motor can endure an irradiation intensity of 1×10⁶ Gy. Its internal circuitry and structure are resistant to aging, making it suitable for long-term, uninterrupted production on semiconductor production lines. The torque stability of the cryogenic stepper motor ensures precision in wafer processing, while its multi-specification design enhances compatibility with semiconductor equipment.
To meet the automation needs of the semiconductor industry, these low-temperature stepper motors support optional features such as safety braking, handwheels, and temperature sensors. They can adapt to both manual debugging and fully automated production modes, enhancing operational convenience and production efficiency. At wafer alignment stations, these motors achieve micron-level positioning accuracy, ensuring precise alignment between wafers and equipment; during vacuum valve control, they precisely regulate chamber opening and closing to maintain a stable vacuum environment; In cryogenic testing equipment, these motors drive the smooth movement of wafers, ensuring testing accuracy. Under demanding cleanroom conditions, their low wear and low failure rate minimize production line downtime. With their strong adaptability, high precision, and long service life, these motors help the semiconductor industry achieve high-precision, high-efficiency, and low-cost intelligent production, establishing themselves as core drive components in the semiconductor manufacturing sector.
Frequently Asked Questions
What is the operating temperature range of KVM series stepper motors?
Depending on the selected rating, they can operate in extreme cold environments down to -196°C (SLT rating) and high-temperature conditions up to +200°C (RHT and SHT ratings).
Can these motors be used in ultra-high vacuum environments?
Yes, these motors can achieve an ultra-high vacuum level of up to 10⁻⁷ Pa. Utilizing solid lubrication technology, they emit no gases, preventing wafer contamination in semiconductor chambers.
Can I install both a brake and position feedback on the same motor?
No, it is not possible to install both safety braking and position feedback devices simultaneously on a single motor.
Are the KVM series motors resistant to radiation?
Yes, with the optional radiation resistance code (RH), the motors can endure an irradiation intensity of up to 1×10⁶ Gy, making them suitable for processes like ion implantation.
What torque range and flange sizes do these low-temperature stepper motors support?
They maintain stable torque within the range of 0.04 to 6 Nm. Available flange sizes include 20, 28, 35, 42, 57, 60, and 86 mm.
What feedback signal options are supported?
They support resolver feedback. Kingsni can provide a signal converter to convert resolver signals to RS485 output or A/B incremental pulse output.
