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KLS Series Vacuum High-Low Temperature Radiation-Resistant Linear Module - China Suppliers and Factory for Semiconductor Testing
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KLS Series Vacuum High-Low Temperature Radiation-Resistant Linear Module - China Suppliers and Factory for Semiconductor Testing

Discover our high-performance stepper motors designed for demanding applications in vacuum, cryogenic, high temperature, and radiation environments. Our stepper motors operate effectively in vacuum conditions as low as 10-7Pa, making them ideal for various industrial settings, With an impressive operational temperature range from -196°C to 200°C, these motors are versatile enough to handle extreme conditions. They are also engineered to withstand radiation exposure of up to 106Gy, ensuring reliable performance in challenging environments, Our stepper motors come in various base widths: 30mm, 40mm, 60mm, 80mm, 135mm, and 170mm, catering to different application needs. They are designed to support a maximum load capacity of 150Kg horizontally and 100Kg vertically, making them suitable for a wide range of tasks, Featuring a repeatability of ±0.01mm, our motors guarantee precision and reliability in every operation. As a trusted manufacturer and supplier in China, we take pride in delivering top-quality stepper motors that meet the highest industry standards. Choose our stepper motors for your next project and experience unmatched performance and durability

    Ordering Information

    KLS

    ① Product series

    KLS series linear motion stage

    ② Base width(mm)

    30 = 30mm

    40 = 40mm

    60 = 60mm

    80 = 80mm

    140 = 135mm

    170 = 170mm

    ③ Stroke length(mm)

    50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, 650, 700, 750, 800, 850, 900, 950, 1000, 1050, 1100, 1150, 1200, 1250, 1300, 1350, 1400, 1450, 1500

    * Please refer to the specification tables for the available stroke length.

    ④ Screw lead(mm)

    2, 4, 5, 10, 16, 20mm

    * Please refer to the specification tables for the available screw lead.

    ⑤ Motor mounting

    ISC: in-line (with coupling)

    PR: parallel on right side (with high precision gear, ratio 1:1)

    PL: parallel on left side (with high precision gear, ratio 1:1)

    PB: parallel below the linear motion stage (with high precision gear, ratio 1:1)

    12
    ⑥ Environmental temperature ratings
    Environmental temperature rating code Temperature range (℃) Vacuum class (Pa, optional) Radiation resistance (Gy, optional)
    RHT -20~+200 10-3 106
    SHT -20~+200 10-3/10-5/10-7 -
    HT -20~+150 10-3/10-5/10-7 -
    NTL1 -40~+85 10-3/10-5 -
    NTL2 -40~+100 - -
    NTL3 -65~+125 10-3 -
    NTL4 -80~+40 10-3 -
    NTL5 -55~+150 - -

    ⑦ Vacuum class

    Blank: Non-vacuum

    V3: Low pressure or vacuum to 10-3Pa

    V5: Vacuum to 10-5Pa

    V7: Vacuum to 10-7Pa

    ⑧ Radiation resistance

    Blank: No radiation resistance

    RH: Radiation resistance (total dose 106Gy)

    ⑨ Designator of mounted motor

    e.g.

    KH42: KH series 42mm stepper motor

    KVM57: KVM series 57mm stepper motor

    KECM400: KECM series 400W servo motor

    KSSM750: KSSM series 750W servo motor

    PB60L2: PB60 2-stage reducer (please specify the reducer stage, e.g. L1 or L2)

    Description

    Core Perspective: Solving "thermal shock-induced jamming and precision drift" in three-temperature testing

    In semiconductor three-temperature testing, chips are often rapidly transferred from a liquid nitrogen environment at -196°C to a high-temperature test zone at +200°C – a temperature swing of nearly 400°C. Standard linear modules frequently suffer from material mismatch under such drastic thermal shock, leading to "jamming" or "stick-slip" behavior that interrupts testing or damages expensive probe cards. The KLS Series Vacuum High-Low Temperature Radiation-Resistant Linear Module is specifically engineered to overcome this challenge. This vacuum high-low temperature radiation-resistant linear module utilizes specialized anti-galling materials for its leadscrews and guideways, ensuring no brittle fracture at min -196°C while maintaining adequate hardness and stiffness at max +200°C. When the test chamber is evacuated to a high vacuum degree of 10^-7Pa, conventional greases would rapidly outgas and disappear. To counter this, this vacuum high-low temperature radiation-resistant linear module employs ceramic-based dry film lubrication, completely eliminating lubrication failure caused by alternating high and low temperatures.

    More critically, the radiation aging test within three-temperature testing requires the module to withstand radiation intensity of 10^6Gy without becoming brittle. Therefore, the KLS Series Vacuum High-Low Temperature Radiation-Resistant Linear Module features radiation-hardened cable jackets and encoder code discs. In terms of mechanical specifications, this vacuum high-low temperature radiation-resistant linear module is offered in body widths of 30/40/60/80/135/170 mm, with the 60mm and 80mm widths being the most common configurations for probe stations. Its maximum load capacity of horizontal 150kg and vertical 100kg is sufficient to support ceramic heating chucks loaded with multiple wafers. The repeatability of ±0.01mm ensures precise alignment between probe tips and bond pads.

    In a typical burn-in test system, the vacuum high-low temperature radiation-resistant linear module undergoes dozens of cycles from low to high temperature daily, each accompanied by drastic vacuum fluctuations. The bellows seal structure of this vacuum high-low temperature radiation-resistant linear module effectively balances internal and external pressure differentials. Moreover, the compact body width of 30mm allows dense packing within multi-site parallel test handlers. Additionally, this vacuum high-low temperature radiation-resistant linear module features a nitrogen purge port to prevent condensation on chamber walls at low temperatures, which could otherwise impair optical alignment. For automotive-grade chip three-temperature testing, every sample requires full traceability. The KLS Series Vacuum High-Low Temperature Radiation-Resistant Linear Module integrates position feedback that uploads displacement data at each temperature setpoint to the MES system. In conclusion, whether facing the cryogenic shock of -196°C, prolonged baking at +200°C, or high-energy particle bombardment at 10^6Gy, this vacuum high-low temperature radiation-resistant linear module consistently delivers stable output with ±0.01mm precision, thoroughly resolving the industry's long-standing pain point of temperature-induced motion failure.

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    Frequently Asked Questions (FAQ)
    How does the KLS Series prevent jamming during extreme thermal shock?
    The KLS Series utilizes specialized anti-galling materials for its leadscrews and guideways. This ensures no brittle fracture at temperatures as low as -196°C while maintaining necessary hardness and stiffness at temperatures up to +200°C.
    What lubrication is used for high vacuum operations?
    To prevent outgassing and lubrication failure in high vacuum environments (up to 10-7Pa), the module features ceramic-based dry film lubrication instead of conventional greases.
    What is the maximum radiation resistance of the KLS module?
    The module is equipped with radiation-hardened cable jackets and encoder code discs designed to withstand radiation intensities up to 106Gy without becoming brittle.
    What are the load capacity and positioning repeatability specifications?
    The KLS Series offers a maximum horizontal load capacity of 150kg, a vertical load capacity of 100kg, and features a positioning repeatability of ±0.01mm.
    How does the module handle condensation in low-temperature testing?
    The module features an integrated nitrogen purge port that prevents condensation on the chamber walls at low temperatures, ensuring optical alignment remains unimpaired.

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