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KLA-AC-600 vacuum high and low temperature radiation resistant micro-electric actuator | applied to precision optical instruments
High Temperature Environment Solutions

KLA-AC-600 vacuum high and low temperature radiation resistant micro-electric actuator | applied to precision optical instruments

Vacuum · Cryogenic · High-temperature · Radiation

  • Vacuum level: 10-9Pa(optional)
  • Ambient temperature: Minimum -80°C, Maximum +200°C
  • Radiation resistance: 1x106Gy(optional)
  • Motion resolution:  Approx. 1 nm
  • Minimum step size: ≤20 nm

    Environmental temperature ratings

    Environmental temperature rating  code Temperature range
    (℃)
    Vacuum class
    (Pa,optional)
    Radiation resistance
    (Gy,optional)
    VHT1 -40~+85 10-1/10-3/10-5/10-710-9 1x1000/1x10000/1x105/1x106
    VHT2 -40~+150 10-1/10-3/10-5/10-710-9 1x1000/1x10000/1x105/1x106
    VHT3 -20~+200 10-1/10-3/10-5/10-710-9 1x1000/1x10000/1x105/1x106
    VHT4 -80~+120 10-1/10-3/10-5/10-710-9 1x1000/1x10000/1x105/1x106

    * Vacuum class

    Blank = Non-vacuum              

    V1 = Low pressure or vacuum to 10-¹ Pa              

    V3 = Low pressure or vacuum to 10-3Pa       

    V5 = Vacuum to 10-5Pa         

    V7 = Vacuum to 10-7Pa      

    V9 = Vacuum to 10-9Pa      


    * Radiation resistance

    RAD1K:1x1000Gy              

    RAD10K:1x10000Gy

    RAD100K:1x105Gy

    RAD1MK:1x106Gy

    Description

    In the process of development and test of precision optical instruments, the final resolution and imaging quality of the system are directly determined by the attitude control of optical elements and the accuracy of optical path alignment. However, when these instruments need to work in vacuum environment, extreme temperature conditions or radiation fields, conventional motion actuators often fail to meet the requirements due to material volatilization, lubrication failure or thermal deformation. Vacuum high and low temperature radiation-resistant micro-electric actuator was born to solve this dilemma, which fully adapts to the harsh environment from material selection, lubrication mode to structural design, and ensures that the optical system maintains its design performance throughout its life cycle.
    For the ground calibration and thermal vacuum test of space telescopes, the position of the mirror in the vacuum cavity must be extremely stable, and any micron drift will lead to the degradation of the image quality of the star point. Vacuum high and low temperature radiation-resistant miniature electric actuators use ceramic bearings and oil-free lubrication pairs to eliminate the pollution of organic volatiles on the mirror surface from the root, which is particularly important for optical systems working in extreme ultraviolet or deep ultraviolet bands. At the same time, the actuator can operate reliably between -80 ℃ and + 200 ℃, and its thermal expansion compensation design keeps the motion resolution at the level of about 1 nm. In a typical thermal cycle test, the optical interferometer needs to continuously record the surface shape changes of the mirror at different temperature nodes, while the vacuum high and low temperature radiation-resistant micro-electric actuator provides a reliable displacement reference for the measurement with its extremely small step (≤ 20 nm) and repetitive positioning accuracy, so that the environmental interference can be effectively separated from the measurement data.
    In precision optical experiments involving intense radiation environments, such as optical diagnostic systems for high energy physics experiments or observation window calibration inside nuclear facilities, the common actuator motor winding insulation deteriorates rapidly. The vacuum high and low temperature radiation-resistant micro-electric actuator can withstand a cumulative dose of up to 1 × 10 1 × 10 Gy, and its internal radiation-resistant material and reinforcement design ensure its long-term service ability in the radiation field. When optical elements need to be adjusted in situ under high radiation background, this vacuum high and low temperature radiation-resistant micro-electric actuator can respond to external control instructions, complete precise adjustment with nano-scale steps, and will not cause motion stagnation or accuracy loss due to radiation. In addition, the low outgassing rate of the actuator enables the ultra-high vacuum optical cavity to reach the working pressure more quickly, thus shortening the experimental preparation period. Whether used for vacuum cryogenic testing of ground-based large optical telescopes or for cold optical calibration of space infrared interferometers, vacuum high and low temperature radiation-resistant micro-electric actuators have become indispensable core moving components in precision optical engineering because of their multi-dimensional environmental adaptability. Through the systematic optimization of materials, lubrication and driving logic, this vacuum high and low temperature radiation-resistant micro-electric actuator truly realizes high-precision and high-reliability motion output under extreme multi-physical field coupling conditions, which provides a s olid technical foundation for the development of the next generation of precision optical instruments. The wide application of vacuum high and low temperature radiation resistant micro-electric actuators has also promoted the innovation of optical testing methods, making the precision calibration which is difficult to carry out in the real service environment become a conventional means, and its technical value has far exceeded the scope of a single actuator, but has become a key enabling technology in extreme optical system integration.

    generating-a-scenario-diagram-of-thermal-shock-blockage-and-three-temperature-test-accuracy-drift-1

    KLS

    ① Product series

    KLS series linear motion stage


    ② Base width(mm)

    30 = 30mm        

    40 = 40mm              

    60 = 60mm

    80 = 80mm

    140 = 135mm 

    170 = 170mm 


    ③ Stroke length(mm)

    50、100、150、200、250、300、350、400、450、500、550、600、650、700、750、800、850、900、950、1000、1050、1100、1150、1200、1250、1300、1350、1400、1450、1500

    Please refer to the specification tables for the available stroke length.


    ④ Screw lead(mm)

    2、4、5、10、16、20mm

    Please refer to the specification tables for the available screw lead.


    ⑤ Motor mounting

    ISC: in-line (with coupling)

    PR: parallel on right side (with high precision gear, ratio 1:1 )

    PL: parallel on left side (with high precision gear, ratio 1:1 )

    PB: parallel below the linear motion stage (with high precision gear, ratio 1:1 )

    12

    ⑥ Environmental temperature ratings
    Environmental temperature rating  code Temperature range
    (℃)
    Vacuum class
    (Pa,optional)
    Radiation resistance
    (Gy,optional)
    RHT -20~+200 10-3 106
    SHT -20~+200 10-3/10-5/10-7 -
    HT -20~+150 10-3/10-5/10-7 -
    NTL1 -40~+85 10-3/10-5 -
    NTL2 -40~+100 - -
    NTL3 -65~+125 10-3 -
    NTL4 -80~+40 10-3 -
    NTL5 -55~+150 - -

    ⑦ Vacuum class

    Blank = Non-vacuum              

    V3 = Low pressure or vacuum to 10-3Pa       

    V5 = Vacuum to 10-5Pa         

    V7 = Vacuum to 10-7Pa      


    ⑧ Radiation resistance

    Blank = No radiation resistance              

    RH = Radiation resistance (total dose 106Gy)


    ⑨ Designator of mounted motor

    e.g. 

    KH42 = KH series 42mm stepper motor                   

    KVM57 = KVM series 57mm stepper motor

    KECM400 = KECM series 400W servo motor 

    KSSM750 = KSSM series750W servo motor        

    PB60L2 = PB60 2-stege reducer  (please specify the reducer stage, e.g. L1 or L2)

    Environmental temperature ratings

    Environmental temperature rating  code Temperature range
    (℃)
    Vacuum class
    (Pa,optional)
    Radiation resistance
    (Gy,optional)
    VHT1 -40~+85 10-1/10-3/10-5/10-710-9 1x1000/1x10000/1x105/1x106
    VHT2 -40~+150 10-1/10-3/10-5/10-710-9 1x1000/1x10000/1x105/1x106
    VHT3 -20~+200 10-1/10-3/10-5/10-710-9 1x1000/1x10000/1x105/1x106
    VHT4 -80~+120 10-1/10-3/10-5/10-710-9 1x1000/1x10000/1x105/1x106

    * Vacuum class

    Blank = Non-vacuum              

    V1 = Low pressure or vacuum to 10-¹ Pa              

    V3 = Low pressure or vacuum to 10-3Pa       

    V5 = Vacuum to 10-5Pa         

    V7 = Vacuum to 10-7Pa      

    V9 = Vacuum to 10-9Pa      


    * Radiation resistance

    RAD1K:1x1000Gy              

    RAD10K:1x10000Gy

    RAD100K:1x105Gy

    RAD1MK:1x106Gy

    Description

    In the fields of modern semiconductor manufacturing, thin film science and surface analysis, vacuum chamber is the core carrier of all processes, and various precise adjustment tasks inside the chamber, including workpiece table lifting, mask alignment, probe positioning and baffle opening control, are inseparable from highly reliable motion actuators. Vacuum micro-electric actuator is a compact precision motion unit specially designed for these application scenarios, which not only meets the compatibility of ultra-high vacuum environment, but also provides nanometer displacement resolution, so that all kinds of fine-tuning operations in the chamber can reach an unprecedented level of accuracy.
    In physical vapor deposition (PVD) or atomic layer deposition (ALD) equipment, the spatial relationship between the substrate and the target or precursor directly determines the thickness uniformity and composition consistency of the film. The minimum step of the vacuum miniature electric actuator is less than or equal to 20nm, so that an operator can finely adjust the in-situ height and the inclination angle of the substrate frame on the premise of not destroying the vacuum. The conditioning is performed against a high vacuum background (10 10 Pa level), and the actuator maintains the purity of the process environment by ensuring that no additional hydrocarbon contaminants or water vapor are introduced into the chamber during the conditioning process through its oil-free lubrication structure and material selection with a very low outgassing rate. At the same time, the driving part of the vacuum micro-electric actuator is specially shielded to reduce the electromagnetic interference to the sensitive detectors (such as residual gas analyzer or quartz crystal microbalance) in the chamber, which is essential for accurately monitoring the film formation rate.
    Inside the scanning electron microscope or focused ion beam equipment, the movement of the sample stage needs to have both high precision and high cleanliness. With its compact shape and flexible installation interface, the vacuum micro-electric actuator can be integrated into the multi-degree-of-freedom adjustment system of the sample stage to achieve x-y-z three-dimensional nano-positioning. When an operator needs to carry out in-situ electrical measurement on the micro-nano structure in the vacuum cavity, the vacuum micro-electric actuator can drive the probe to approach the measured electrode at a nanometer step, thereby avoiding mechanical backlash and vibration disturbance caused by the traditional manual adjustment. In addition, the actuator has little wear in long-term continuous operation, and its motion life is much higher than that of similar products using traditional lubrication in vacuum environment, thus greatly reducing the frequency of cavity breaking maintenance due to the failure of moving parts. For a semiconductor production line that runs 24 hours a day, this high reliability means higher equipment utilization and lower maintenance costs. Vacuum micro-electric actuators also support temperature shocks along with the equipment during high temperature baking (for vacuum degassing) without performance degradation, further enhancing their utility in harsh vacuum processes. In a word, vacuum micro-electric actuator has become the standard solution of precision adjustment in high-end vacuum equipment because of its comprehensive advantages of pollution-free, high precision, long life and vacuum compatibility. Whether in the single-cavity system of scientific research laboratory or in the industrial cluster production platform, vacuum micro-electric actuator is playing an irreplaceable role continuously and steadily. The technology maturity of vacuum micro-electric actuators is also improving with wider applications.

    6-2

    KLS

    ① Product series

    KLS series linear motion stage


    ② Base width(mm)

    30 = 30mm        

    40 = 40mm              

    60 = 60mm

    80 = 80mm

    140 = 135mm 

    170 = 170mm 


    ③ Stroke length(mm)

    50、100、150、200、250、300、350、400、450、500、550、600、650、700、750、800、850、900、950、1000、1050、1100、1150、1200、1250、1300、1350、1400、1450、1500

    Please refer to the specification tables for the available stroke length.


    ④ Screw lead(mm)

    2、4、5、10、16、20mm

    Please refer to the specification tables for the available screw lead.


    ⑤ Motor mounting

    ISC: in-line (with coupling)

    PR: parallel on right side (with high precision gear, ratio 1:1 )

    PL: parallel on left side (with high precision gear, ratio 1:1 )

    PB: parallel below the linear motion stage (with high precision gear, ratio 1:1 )

    12

    ⑥ Environmental temperature ratings
    Environmental temperature rating  code Temperature range
    (℃)
    Vacuum class
    (Pa,optional)
    Radiation resistance
    (Gy,optional)
    RHT -20~+200 10-3 106
    SHT -20~+200 10-3/10-5/10-7 -
    HT -20~+150 10-3/10-5/10-7 -
    NTL1 -40~+85 10-3/10-5 -
    NTL2 -40~+100 - -
    NTL3 -65~+125 10-3 -
    NTL4 -80~+40 10-3 -
    NTL5 -55~+150 - -

    ⑦ Vacuum class

    Blank = Non-vacuum              

    V3 = Low pressure or vacuum to 10-3Pa       

    V5 = Vacuum to 10-5Pa         

    V7 = Vacuum to 10-7Pa      


    ⑧ Radiation resistance

    Blank = No radiation resistance              

    RH = Radiation resistance (total dose 106Gy)


    ⑨ Designator of mounted motor

    e.g. 

    KH42 = KH series 42mm stepper motor                   

    KVM57 = KVM series 57mm stepper motor

    KECM400 = KECM series 400W servo motor 

    KSSM750 = KSSM series750W servo motor        

    PB60L2 = PB60 2-stege reducer  (please specify the reducer stage, e.g. L1 or L2)

    Model Thrust (N) Stroke (mm) Minimum Incremental Step (nm) Repeatability (μm)
    KLA-AC-300 300 ±3 20 ±2
    KLA-AC-600 600 ±10 18 ±2

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