KLA-AC-600 Vacuum Micro Electric Actuator | Precision Adjustment in Vacuum Chamber | China Suppliers & Factory

In the fields of modern semiconductor manufacturing, thin film science and surface analysis, vacuum chamber is the core carrier of all processes, and various precise adjustment tasks inside the chamber, including workpiece table lifting, mask alignment, probe positioning and baffle opening control, are inseparable from highly reliable motion actuators. Vacuum micro-electric actuator is a compact precision motion unit specially designed for these application scenarios, which not only meets the compatibility of ultra-high vacuum environment, but also provides nanometer displacement resolution, so that all kinds of fine-tuning operations in the chamber can reach an unprecedented level of accuracy.

In physical vapor deposition (PVD) or atomic layer deposition (ALD) equipment, the spatial relationship between the substrate and the target or precursor directly determines the thickness uniformity and composition consistency of the film. The minimum step of the vacuum miniature electric actuator is less than or equal to 20nm, so that an operator can finely adjust the in-situ height and the inclination angle of the substrate frame on the premise of not destroying the vacuum. The conditioning is performed against a high vacuum background (10^-10 Pa level), and the actuator maintains the purity of the process environment by ensuring that no additional hydrocarbon contaminants or water vapor are introduced into the chamber during the conditioning process through its oil-free lubrication structure and material selection with a very low outgassing rate. At the same time, the driving part of the vacuum micro-electric actuator is specially shielded to reduce the electromagnetic interference to the sensitive detectors (such as residual gas analyzer or quartz crystal microbalance) in the chamber, which is essential for accurately monitoring the film formation rate.

Inside the scanning electron microscope or focused ion beam equipment, the movement of the sample stage needs to have both high precision and high cleanliness. With its compact shape and flexible installation interface, the vacuum micro-electric actuator can be integrated into the multi-degree-of-freedom adjustment system of the sample stage to achieve x-y-z three-dimensional nano-positioning. When an operator needs to carry out in-situ electrical measurement on the micro-nano structure in the vacuum cavity, the vacuum micro-electric actuator can drive the probe to approach the measured electrode at a nanometer step, thereby avoiding mechanical backlash and vibration disturbance caused by the traditional manual adjustment. In addition, the actuator has little wear in long-term continuous operation, and its motion life is much higher than that of similar products using traditional lubrication in vacuum environment, thus greatly reducing the frequency of cavity breaking maintenance due to the failure of moving parts. For a semiconductor production line that runs 24 hours a day, this high reliability means higher equipment utilization and lower maintenance costs. Vacuum micro-electric actuators also support temperature shocks along with the equipment during high temperature baking (for vacuum degassing) without performance degradation, further enhancing their utility in harsh vacuum processes. In a word, vacuum micro-electric actuator has become the standard solution of precision adjustment in high-end vacuum equipment because of its comprehensive advantages of pollution-free, high precision, long life and vacuum compatibility. Whether in the single-cavity system of scientific research laboratory or in the industrial cluster production platform, vacuum micro-electric actuator is playing an irreplaceable role continuously and steadily. The technology maturity of vacuum micro-electric actuators is also improving with wider applications.