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China KSSM Series Vacuum Servo Motor - High/Low Temperature Radiation-Resistant Factory Suppliers for Wafer Transport Robots
Options
- ● Safe brake
- ● 48/110VDC winding voltage
- ● Custom cable lengths
Ordering Information
① Product series
KSSM series servo motor
② Winding voltage
48 = 48VDC 220 = 220VAC 380 = 380VAC
③ Stroke length
400 = 400W 750 = 750W 1800 = 1800W 3800 = 3800W
④ Safe brake
Blank = without safe brake B = with safe brake
⑤ Environmental temperature ratings
| Environmental temperature rating code | Temperature range (℃) | Vacuum class (Pa, optional) |
Radiation resistance (Gy, optional) |
|---|---|---|---|
| RHT | -20～+200 | 10-3 | 106 |
| SHT | -20～+200 | 10-3/10-5/10-7 | - |
| HT | -20～+150 | 10-3/10-5/10-7 | - |
| NTL1 | -40～+85 | 10-3/10-5 | - |
| NTL2 | -60～+120 | 10-3/10-5 | - |
| NTL3 | -65～+125 | 10-3 | - |
| NTL4 | -60～+150 | - | - |
| NTL5 | -80～+40 | 10-3 | - |
| SLT* | -196～+40 | 10-3/10-3/10-3 | - |
| L*H* | customized | customized | customized |
*It is recommended that, when the KSSM servo motor is operated in the SLT temperature range (-196 to +40℃), the speed should be limited to a maximum of 300rpm. Contact us for details.
⑥ Vacuum class
Blank = Non-vacuum
V3 = Low pressure or vacuum to 10-3Pa
V5 = Vacuum to 10-5Pa
V7 = Vacuum to 10-7Pa
V3 = Low pressure or vacuum to 10-3Pa
V5 = Vacuum to 10-5Pa
V7 = Vacuum to 10-7Pa
⑦ Radiation resistance
Blank = No radiation resistance
RH = Radiation resistance (total dose 106Gy)
RH = Radiation resistance (total dose 106Gy)
Description
Within advanced semiconductor fabs, wafer handling robots must execute precise pick-and-place sequences inside process chambers maintained at 10⁻⁷ Pa. The KSSM series vacuum high and low temperature radiation-resistant servo motor is engineered to meet these extreme demands. This vacuum high and low temperature radiation-resistant servo motor employs a stainless steel envelope and proprietary sealing techniques, yielding outgassing rates so low that ultra-high vacuum integrity remains uncompromised. Across a temperature spectrum from -196℃ up to +260℃, the vacuum high and low temperature radiation-resistant servo motor delivers consistent torque — whether submerged in liquid nitrogen or exposed to post-process baking. For environments where scattered X-rays or electron beams are present, the unit withstands accumulated doses of 1×10⁶ Gy, thanks to radiation-hardened insulation, lubricants, and feedback components. A resolver-based feedback system provides absolute position data while rejecting electromagnetic interference from nearby plasma sources. Mounted directly at robotic arm articulations, the KSSM series vacuum high and low temperature radiation-resistant servo motor eliminates the need for magnetic fluid feedthroughs, reducing mechanical complexity and improving dynamic response. Every vacuum high and low temperature radiation-resistant servo motor is subjected to vacuum bake-out and radiation aging protocols prior to shipment, ensuring trouble-free operation in high-volume manufacturing environments. Adoption of this vacuum high and low temperature radiation-resistant servo motor has led to measurable improvements in wafer transport reliability and reductions in breakage incidents. Whether configured for 200 mm or 300 mm platforms, the KSSM series vacuum high and low temperature radiation-resistant servo motor provides a dependable motion solution. Consequently, the vacuum high and low temperature radiation-resistant servo motor has become a cornerstone of modern wafer handling, affirming its essential role in semiconductor front-end processing.
Frequently Asked Questions
Q:
What options are available for the KSSM series servo motor?
The motor offers options such as a safe brake, 48/110VDC winding voltage, and custom cable lengths.
Q:
What is the recommended operational limit for the SLT temperature range?
When operating within the SLT temperature range (-196 to +40℃), it is recommended to limit the speed of the KSSM servo motor to a maximum of 300rpm.
Q:
What vacuum classes are supported by the KSSM series?
The series supports multiple vacuum classes including V3 (low pressure or vacuum to 10-3Pa), V5 (vacuum to 10-5Pa), and V7 (vacuum to 10-7Pa).
Q:
What level of radiation resistance can the KSSM motor withstand?
With the RH radiation resistance option, the motor is designed to withstand accumulated radiation doses of up to 106 Gy.
Q:
How does the KSSM servo motor maintain vacuum integrity in semiconductor fabs?
It employs a stainless steel envelope and proprietary sealing techniques that provide extremely low outgassing rates, ensuring that ultra-high vacuum integrity (down to 10-7 Pa) is not compromised.
Q:
Why does the KSSM motor eliminate the need for magnetic fluid feedthroughs?
By mounting directly at the robotic arm articulations, it removes the need for magnetic fluid feedthroughs, which reduces mechanical complexity and improves overall dynamic response.