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China KSSM Series Vacuum High and Low Temperature Radiation-Resistant Servo Motor - Suppliers & Factory Options Available
Options
- Safe brake
- 48/110VDC winding voltage
- Custom cable lengths
Ordering Information
① Product series
KSSM series servo motor
② Winding voltage
48=48VDC
220=220VAC
380=380VAC
220=220VAC
380=380VAC
③ Stroke length
400 = 400W
750 = 750W
1800 = 1800W
3800 = 3800W
750 = 750W
1800 = 1800W
3800 = 3800W
④ Safe brake
Blank = without safe brake
B = with safe brake
B = with safe brake
⑤ Environmental temperature ratings
| Environmental temperature rating code | Temperature range (℃) | Vacuum class (Pa, optional) | Radiation resistance (Gy, optional) |
|---|---|---|---|
| RHT | -20~+200 | 10-3 | 106 |
| SHT | -20~+200 | 10-3/10-5/10-7 | - |
| HT | -20~+150 | 10-3/10-5/10-7 | - |
| NTL1 | -40~+85 | 10-3/10-5 | - |
| NTL2 | -60~+120 | 10-3/10-5 | - |
| NTL3 | -65~+125 | 10-3 | - |
| NTL4 | -60~+150 | - | - |
| NTL5 | -80~+40 | 10-3 | - |
| SLT* | -196~+40 | 10-3/10-3/10-3 | - |
| L*H* | customized | customized | customized |
*It is recommended that, when the KSSM servo motor is operated in the SLT temperature range (-196 to +40℃), the speed should be limited to a maximum of 300rpm. Contact us for details.
⑥ Vacuum class
Blank = Non-vacuum
V3 = Low pressure or vacuum to 10-3Pa
V5 = Vacuum to 10-5Pa
V7 = Vacuum to 10-7Pa
V3 = Low pressure or vacuum to 10-3Pa
V5 = Vacuum to 10-5Pa
V7 = Vacuum to 10-7Pa
⑦ Radiation resistance
Blank = No radiation resistance
RH = Radiation resistance (total dose 106Gy)
RH = Radiation resistance (total dose 106Gy)
Description
Within advanced semiconductor fabs, wafer handling robots must execute precise pick-and-place sequences inside process chambers maintained at 10⁻⁷ Pa. The KSSM series vacuum high and low temperature radiation-resistant servo motor is engineered to meet these extreme demands. This vacuum high and low temperature radiation-resistant servo motor employs a stainless steel envelope and proprietary sealing techniques, yielding outgassing rates so low that ultra-high vacuum integrity remains uncompromised. Across a temperature spectrum from -196℃ up to +260℃, the vacuum high and low temperature radiation-resistant servo motor delivers consistent torque — whether submerged in liquid nitrogen or exposed to post-process baking. For environments where scattered X-rays or electron beams are present, the unit withstands accumulated doses of 1×10⁶ Gy, thanks to radiation-hardened insulation, lubricants, and feedback components. A resolver-based feedback system provides absolute position data while rejecting electromagnetic interference from nearby plasma sources. Mounted directly at robotic arm articulations, the KSSM series vacuum high and low temperature radiation-resistant servo motor eliminates the need for magnetic fluid feedthroughs, reducing mechanical complexity and improving dynamic response. Every vacuum high and low temperature radiation-resistant servo motor is subjected to vacuum bake-out and radiation aging protocols prior to shipment, ensuring trouble-free operation in high-volume manufacturing environments. Adoption of this vacuum high and low temperature radiation-resistant servo motor has led to measurable improvements in wafer transport reliability and reductions in breakage incidents. Whether configured for 200 mm or 300 mm platforms, the KSSM series vacuum high and low temperature radiation-resistant servo motor provides a dependable motion solution. Consequently, the vacuum high and low temperature radiation-resistant servo motor has become a cornerstone of modern wafer handling, affirming its essential role in semiconductor front-end processing.
Frequently Asked Questions (FAQ)
What is the operating temperature range of the KSSM series servo motor?
The KSSM series servo motor is designed to operate reliably across an extreme temperature range from -196℃ up to +260℃, making it suitable for both cryogenic liquid nitrogen environments and high-temperature post-process baking.
Can this motor be used in ultra-high vacuum environments?
Yes. The KSSM series utilizes a stainless steel envelope and specialized sealing technology to ensure extremely low outgassing rates, making it fully compatible with vacuum environments up to 10⁻⁷ Pa.
What is the radiation resistance capacity of the KSSM motor?
Equipped with radiation-hardened insulation, materials, and feedback components, the motor can withstand accumulated radiation doses of up to 1×10⁶ Gy.
Why is a resolver-based feedback system used?
The resolver-based system provides highly reliable absolute position data while successfully rejecting electromagnetic interference (EMI) originating from nearby plasma sources in semiconductor processing chambers.
Are there any speed limitations for the SLT (ultra-low temperature) range?
Yes, when operating within the SLT temperature range (-196 to +40℃), it is recommended to limit the motor speed to a maximum of 300rpm. Please contact us for specialized support regarding specific application parameters.










