KLS Series Vacuum Linear Module for Optical Coating - China Suppliers and Factory for High-Performance Applications
Ordering Information
1 Product series
KLS series linear motion stage
2 Base width(mm)
30 = 30mm
40 = 40mm
60 = 60mm
80 = 80mm
140 = 135mm
170 = 170mm
3 Stroke length(mm)
50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, 650, 700, 750, 800, 850, 900, 950, 1000, 1050, 1100, 1150, 1200, 1250, 1300, 1350, 1400, 1450, 1500
*Please refer to the specification tables for the available stroke length.
4 Screw lead(mm)
2, 4, 5, 10, 16, 20mm
*Please refer to the specification tables for the available screw lead.
5 Motor mounting
ISC: in-line (with coupling)
PR: parallel on right side (with high precision gear, ratio 1:1)
PL: parallel on left side (with high precision gear, ratio 1:1)
PB: parallel below the linear motion stage (with high precision gear, ratio 1:1)
6 Environmental temperature ratings
| Environmental temperature rating code | Temperature range (℃) | Vacuum class (Pa, optional) | Radiation resistance (Gy, optional) |
|---|---|---|---|
| RHT | -20～+200 | 10-3 | 106 |
| SHT | -20～+200 | 10-3/10-5/10-7 | - |
| HT | -20～+150 | 10-3/10-5/10-7 | - |
| NTL1 | -40～+85 | 10-3/10-5 | - |
| NTL2 | -40～+100 | - | - |
| NTL3 | -65～+125 | 10-3 | - |
| NTL4 | -80～+40 | 10-3 | - |
| NTL5 | -55～+150 | - | - |
7 Vacuum class
Blank: Non-vacuum
V3: Low pressure or vacuum to 10-3Pa
V5: Vacuum to 10-5Pa
V7: Vacuum to 10-7Pa
8 Radiation resistance
Blank: No radiation resistance
RH: Radiation resistance (total dose 106Gy)
9 Designator of mounted motor
e.g.
KH42: KH series 42mm stepper motor
KVM57: KVM series 57mm stepper motor
KECM400: KECM series 400W servo motor
KSSM750: KSSM series 750W servo motor
PB60L2: PB60 2-stage reducer (please specify the reducer stage, e.g. L1 or L2)
Description
Core Perspective: The pursuit of "zero contamination" and "uniformity" in optical coating.
Optical coatings, particularly laser mirrors and infrared antireflection layers, demand defect-free film structures. Any particle contamination can create "pinholes," drastically reducing the laser-induced damage threshold. Standard modules operating under high vacuum degree of 10-7Pa continuously outgas water vapor and hydrocarbons, which, when decomposed by plasma, deposit onto optics as absorptive contamination layers. The KLS Series Vacuum Linear Module fundamentally solves this problem. This vacuum linear module utilizes materials – from guideways and leadscrews to motor cables – that have undergone rigorous outgassing rate testing, with Total Mass Loss (TML) and Collected Volatile Condensable Materials (CVCM) meeting aerospace-grade requirements.
During ion-beam-assisted deposition (IBAD), this vacuum linear module must operate for extended periods at substrate heating temperatures reaching max +200°C. Its specially designed ferrofluidic feedthrough ensures no leakage at the motion feedthrough flange. When coating certain film stacks that require substrates to be cryogenically trapped at min -196°C, this vacuum linear module performs equally well without cold-induced jamming. For extreme ultraviolet (EUV) mirrors used in large-scale scientific facilities, the coating process is extremely vibration-sensitive. The KLS Series Vacuum Linear Module features a low-ripple drive algorithm that ensures the vibration amplitude generated during ±0.01mm repeatability motion remains below 50 nanometers.
Regarding specification selection, this vacuum linear module offers a heavy-duty version with a body width of 170mm. Its maximum load capacity of horizontal 150kg can support space-qualified primary mirrors exceeding one meter in diameter. Conversely, the miniature body width of 30mm vacuum linear module suits moving shutters or crystal monitor heads inside small experimental coaters. Notably, this vacuum linear module tolerates radiation intensity of 106Gy, qualifying it for post-coating treatment of radiation-resistant optical windows for nuclear facilities. In actual production, the KLS Series Vacuum Linear Module typically operates as a "planetary drive" for coating domes: it drives a planetary gear mechanism, moving optics in a programmed trajectory above evaporation sources, controlling film thickness non-uniformity to below 0.5%. The body width 40mm and 60mm versions are most popular due to their low installation profile and ease of integration. Furthermore, this vacuum linear module offers remote fault diagnosis. If abnormal resistance is detected within the 10-7Pa vacuum chamber, it issues early warnings, preventing costly chamber venting and production losses. Simply put, without a clean, reliable vacuum linear module like the KLS Series, high-end optical coating cannot transcend from "acceptable" to "exceptional."
