KSSM Series Servo Motor for extreme environmental conditions of vacuum, cryogenic , high-temperature and radiation
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Extreme-Environment Compatibility: This servo motor is engineered for ultra-high vacuum (10-8 Pa), cryogenic temperatures down to -196°C, high temperatures up to +260°C, and radiation exposure up to 10⁶ Gy, making it ideal for semiconductor manufacturing and other demanding applications.
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Robust Construction: Featuring a stainless steel housing and a specially designed resolver for position feedback, this servo motor delivers reliable performance under harsh conditions where standard motors fail.
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Wide Power & Torque Range: Available with rated power from 400W to 3.8kW and holding torque from 1.27 to 15 N·m, this servo motor provides flexible options to meet diverse application requirements.
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Multiple Voltage Options: This servo motor supports winding voltages of 48 VDC, 220 VAC, or 380 VAC, allowing seamless integration into various system architectures.
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High-Speed Operation: With a rated speed of 3000 rpm, this servo motor ensures precise and efficient motion control for high‑throughput semiconductor equipment.


