KLS series linear motion stage for extreme environmental conditions of vacuum, cryogenic , high-temperature and radiation
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Extreme-Environment Compatibility: This linear motion stage is engineered for ultra-high vacuum (10-8 Pa), cryogenic temperatures down to -196°C, high temperatures up to +260°C, and radiation exposure up to 10⁶ Gy, ensuring reliable operation in the most demanding conditions.
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Compact & Rigid Design: Featuring an integrated structure and compact footprint, this linear motion stage delivers high rigidity, exceptional repeatability, and fast speed, making it ideal for precision-critical applications.
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High Load Capacity: Despite its compact size, this linear motion stage offers high load capacity, providing stable and accurate motion even under significant payloads.
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Versatile Applications: Widely used in biomedical research, semiconductor manufacturing, environmental simulation testing, in-vacuum processing equipment, and general automation, this linear motion stage meets the rigorous demands of advanced industrial and scientific environments.


