KSSM Series Servo Motor for extreme environmental conditions of vacuum, cryogenic , high-temperature and radiation
Servo motors for Semiconductor manufacturing power 0.4~3.8KW 48VDC 220/380VAC3000rpm torque 1.27 15Nm
KSSM brushless servo motors are designed with the intention of being suitable for use in the most extreme environments, including ultra-high-vacuum (UHV) 10-7Pa, cryogenic -196℃, high temperature +260℃, radiation 106Gy. KSSM servo motors are constructed with stainless steel cases, and equipped with specially designed resolver as position feedback devices. The rated power ranges from 400W to 3800W, and the available winding voltage options are 48VDC, 220VAC or 380VAC.


