KRS Series Precision Rotary Stage
High-Precision Rotation Solution for Extreme Environments
As a professional vacuum Rotary Stage manufacturer, Kingsni Technology understands that in high-end fields such as scientific instruments, semiconductor manufacturing, and optical inspection, equipment requires high-precision rotational motion in harsh environments including ultra-high vacuum, extreme temperatures, and strong radiation. Traditional rotary stages struggle to meet these demanding requirements, leading to decreased equipment accuracy or even failure.
Chengdu Kingsni Technology Co., Ltd. introduces the KRS Series Precision Rotary Stages, specifically designed for extreme environments with features of compact structure, high precision, and long service life, perfectly solving rotational motion challenges in harsh conditions.
Core Keywords:
Class 1000 Clean Vacuum Rotary Stage
Cleanroom Precision Vacuum Rotary Stage
Ultra-High Vacuum Rotary Stage
Low Outgassing Vacuum Electric Cylinder
Semiconductor Lithography Rotary Stage
Low Outgassing Vacuum Rotary Stage
High-Precision Vacuum Rotary Stage
Oil-Free Lubrication Vacuum Rotary Stage
1. Extreme Environment Adaptability
● Ultra-high vacuum compatibility (10-7Pa): Special materials and sealing processes ensure long-term stable operation in vacuum environments
● Ultra-wide temperature range (-80℃ ~ +200℃): Aerospace-grade materials and lubrication technology adapt to extreme cold and high temperature environments
● Strong radiation resistance (1×106Gy): Key components use radiation-resistant materials, suitable for nuclear applications
● Cleanroom compatibility: Optional Class 1000 clean design to meet semiconductor and optical applications
2. Excellent Motion Performance
| Parameter | Specification |
| Vacuum Degree | 10-7Pa |
| Environmental Temperature | -80°C ~ +200°C |
| Radiation Dose | 1×106Gy |
| Repeat Accuracy | ±0.005° (±0.3') |
| Center Load Capacity | Maximum 150Kg |
| Drive Motor | Stepper Motor, Servo Motor |
Typical Application Fields
Scientific Instruments: Synchrotron radiation sources, Electron microscopes
Semiconductor Manufacturing: Lithography machines, Wafer inspection equipment
Optical Inspection: High-precision optical platforms, Lens testing
Vacuum Coating: Thin film deposition equipment rotation systems
Materials Research: Sample stage rotation positioning systems
Aerospace Technology: Satellite component testing platforms
Biomedical: Cell imaging rotary platforms
Industrial Automation: Cleanroom production lines
Why Choose Kingsni KRS Series?
● Professional vacuum rotary stage manufacturerwith 10+ years of extreme environment product R&D experience
● High-precision designwith repeat accuracy up to ±0.005°, meeting precision application requirements
● Multiple specialized models available: Class 1000 clean type, ultra-high vacuum type, oil-free lubrication type, etc.
● Fast customization service, providing special environment adaptability solutions
● Chengdu Kingsni Technology Co., Ltd.
Specializing in the R&D, manufacturing and application of motor drives, mechanical transmission, and motion control products for extreme environments such as vacuum, cryogenic, high temperature, and radiation